Accurate Small-Scale Manipulation

high tech bedrijven demcon 1510272

A 3-DoF micro-electromechanical (MEMS) stage has been designed with an innovative integrated feedback system based on thermal sensors. The stage is integrated in the device layer of a silicon-oninsulator-wafer, which means that no assembly is required and the stage can be fabricated using only a single mask. The range of motion is over 160 µm in two directions and 325 mrad of rotation, which exceeds the range of motion of existing MEMS stages by far.

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