Brooks Instrument expands product portfolio and strategic focus for semiconductor processing applications

Brooks Instrument has expanded its commitment to the semiconductor industry with the introduction of four products and a new technology development center in Irvine, Calif. The new products include the GF135 advanced diagnostic mass flow controller (MFC) and three MFCs for high-flow applications. These MFCs, which expand Brooks’ GF100 Series product line for semiconductor processing applications, are all built on a common platform and interface, enabling an entire system to use one product platform.

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