High Throughput with High Travel Accuracy and Stability: Precision XY Stages for Industrial Applications

In order to achieve high throughput today, industrial measuring technology and microscopy, optical inspection tasks, and laser processing need positioning systems that are as fast as possible and offer high travel accuracy and stability.

For these application fields, PI (Physik Instrumente) now offers a new series of different motorized XY stages (V-731 and L-731) that work with velocities up to 200 mm/s. The bidirectional repeatability is 0.1 µm and minimum incremental motion is 0.02 µm. The XY stages, which have a size of only 310 × 310 × 80 mm, are offered with travel ranges of 205 × 205 mm (8 inches) and it is also possible to offer customized versions. They are controlled by PI controllers or – in multi-axis gantry applications – via an industrial controller from ASC, a worldwide leading manufacturer of modular motion controllers, who was taken over by PI at the beginning of 2017.

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