Magnetic encoders contribute to reliable wafer transfer robots

high tech bedrijven renishaw 160127

A wafer ultimately becomes multiple IC-units in a series of complicated processes, where wafers rely on a wafer transfer robot to perform fast and accurate transfers between process stations. Wafers are valuable and break easily, meaning that stability and reliability are critical for the robot’s effectiveness. A Korea-based robot manufacturer Robot and Design (RND) uses a RLS LM10 series incremental magnetic encoder system to optimize the performance of its wafer transfer robots. RLS is a Slovenian associate company of Renishaw.

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