A wide range of industrial processes use electrical plasmas, and new applications are developing rapidly. In the microelectronics industry the demands of higher yields and shrinking device geometries mean that process reproducibility and understanding is crucial. We sat down with Hiden Analytical technical expert Sam Bort to talk about plasma characterisation: what it really means in practice, why it matters so much in thin films and surface engineering, and how the right diagnostics help researchers connect plasma physics and plasma chemistry to process performance. Read more
