Benelux Process

Benelux Process

Benelux Process supplies in association with 10 top successful European technology enterprises vacuum equipment and advanced vacuum technology solutions for the coating, structuring and processing of surfaces through the application of plasma and ion beam processes.

Analytical process tools and workstations from Hiden Analytical for; plasma characterization, SIMS surface science, TPD thermal desorption studies. RGA residual gas analysis. Gas analysis instruments for catalysis studies, fuel cell characterization, bio fuel analysis for production facilities and research institutes.

scia Systems was founded 2013 in partnership with the VON ARDENNE GmbH from Dresden. The company manufactures advanced ion beam and plasma processing equipment, for the production of microelectronics, MEMS and precision optical components, in both, high volume production as well as applications in research and development. scia Systems provides highly reliable tools together with a superior technology support.The process systems address the entire spectrum in ion beam technology and are available with special source arrangements on platforms that accommodate all standard wafer sizes. The tools are flexible and modular in design. Several vacuum process chambers can be combined into cluster or in-line solutions, according to customer-specific requirements.

Benelux Process offers you innovative technology solutions in this domain for your laboratory and production setups. With over 25 years of experience in the matter Benelux Process offers you environmentally friendly technology, products and theirservices in this field.


Products and Technologies

Process equipment and analytical tools

• Flexible Process Systems for Research, Development, Prototyping and Small Scale Production.
• Analytical tools for the gas, plasma and surface analysis.
• Online multi component gas analyzers
• Vacuum heat treatment furnaces

Vaccuum technology

• Industrial vacuum process pumps and exhaust management systems
• Laboratory vacuum pumps
• Vacuum measurement and control systems
• Vacuum pumps replacement parts


Service and customer support

• Installations of complete vacuum systems and on-site product training are done in collaboration with suppliers.
• tailor made service contracts for all process equipment and instruments.
• Preventive maintenance and spare parts logistics.
• Telephone maintenance consulting services.
• Local and on-site vacuum pump repair service and exchange of vacuum pumps.

Benelux Process strives to increase the uptime of the systems and optimize the cost-benefit relationship of maintenance services through:

• Transparent Cost Calculations
• Low Down-Time Risks
• Efficient Work Methods
• High System Availability
• Planned Maintenance Periods


Characterising Catalysts with Operando Spectroscopy

May 15, 2021

Operando spectroscopy is a critical tool in the field of catalysis. It takes its name from the Latin word for “working” as it covers spectroscopic analyses of catalytic reactions under working conditions. This differs from standard spectroscopic methods by combining spectroscopy of the catalyst under working conditions with on-line reaction monitoring. By combining these methods operando spectroscopy can offer new insights into different catalytic mechanisms representative of dynamic reaction pathways under real-world conditions. Read more

Gauges being vital to any vacuum system in order to efficiently control and monitor processes

May 1, 2021

More info about Edwards Gauges.

Real Time Gas Analysis from Hiden Analytical

April 16, 2021

Gas analysis by mass spectrometry, is fast, sensitive and quantitative. This animated video takes you through the steps of instrument set-up, the calibration routines which provide for quantitative analysis and data output. Watch the video

Oil-sealed vacuum pump for permanent operation in lab and industrial applications

February 6, 2021

For more than 65 years, Welch has provided oil-sealed, rotary vane pumps to fulfil customer needs in laboratory and industrial applications. Rotary vane pumps and systems are available as direct and belt-driven versions. Read more [Source: welchvacuum.com]

DIGITEL™ QPC Quad Pump Controller

November 12, 2020

The QPC ion pump controller is the new reference on the market. It controls up to 4 ion pumps independently, and is the world’s first ion pump controller featuring a large, color, touch panel. The large and bright display means pump parameters can be easily read in most conditions, from both wide angles and at long distances. Read more [Source: gammavacuum]

VD8 Vacuum Meters

August 14, 2020

The VD8 compact vacuum meter can be used as a portable instrument or for permanent installation in vacuum facilities. The vacuum meters can be operated by a battery or a plugin power supply. Read more [Source: thyracont-vacuum]

Semiconductor Dry Pumps

July 5, 2020

Our innovative range of dry pumps brings you cutting-edge technology designed to enhance your semiconductor and electronics manufacturing environment. Each range has been specifically designed to bring you advantages in environmental performance, reliability in harsh conditions and agility in light duty applications. Read more [Source: edwardsvacuum]

Gas Analysis

June 16, 2020

Trusted to deliver specialist gas analysis solutions worldwide, our supplier Hiden Analytical is one of the industry-leading gas analyser manufacturers for precision applications. Via this link you will find a full list of our mass spectrometry solutions for gas analysis applications. [Source: hidenanalytical]

Advancing Pulsed Plasma Characterisation

July 30, 2019

The performance of the Hiden family of plasma diagnostic tools is further advanced by integration of on-board timers for real-time pulsed plasma measurement, the fast gating fully controllable within the MASsoft operating program. Two timers provide ‘gate open/close’ and ‘gate increment’ periodicity with sub-microsecond gating resolution to just 100 nanoseconds, phasing data acquisition precisely with each individual plasma pulse. Read more

Hiden Mass Spectrometers with Dual-Stream Sampling

November 26, 2015

high tech bedrijven benelux process 151126

Hiden HPR-20 and QGA series quadrupole mass spectrometers are configurable for diverse real-time gas analysis applications by selection of the appropriate application-specific process interface. The latest interface – the all-new dual-stream capillary sampling interface – is developed for process monitoring under flowing conditions to enable fast sample switching between the feed and exhaust gas streams.

Automated Catalyst Characterisation

January 26, 2015

The Hiden CATLAB-PCS combined microreactor and mass spectrometer system is purpose designed for the characterisation and evaluation of catalysts together with general thermal studies including temperature programmed desorption and reaction testing. The modular benchtop system features an advanced fast-response low thermal mass 1000C furnace together with multistream gas flow control of up to eight gas streams, and a precision Hiden quadrupole mass spectrometer with quartz inert sampling line close-coupled directly to the reactor for minimised dead volume and sample memory.

Hiden analytical micro-reactor/mass spectrometer

July 10, 2012


The Hiden CATLAB integrated micro-reactor/mass spectrometer system is specifically optimised for continuous quantitative real-time analysis of catalytic activity and reaction components. The close-coupled mass spectrometer samples directly from the reactor zone for fastest response and precise process characterisation, providing overall response times of less than 0.5 seconds and with data accumulation rates at up to 500 data-points per second.