Dr. Toyoda of Nagoya University has received an award for his paper “Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma”. Read more
Dr. Toyoda of Nagoya University has received an award for his paper “Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma”. Read more