High precision in semiconductor industry applications. The main parameter that characterizes motion in the semiconductor industry is high precision, be it front- or back-end. Regardless of the application; lithography, metrology and inspection, wafer handling, and die-attach, all require the stage to have high accuracy and repeatability with ever-growing throughput requirements, resulting in an optimized cost per unit and best system ROI. Direct drive motors make these requirements possible. Whether atmospheric or vacuum environment, Tecnotion linear and rotary motors can meet these needs. Read more
