What Do We Mean by “Usable Range” of a Mass Flow Controller?
What is the “usable” range of a mass flow controller? Is usable range the same as turndown ratio? Before we answer these questions, let’s make sure we’re all grounded on the basics, like what is a mass flow controller (MFC) and where are they used. Read more
SEMI standards leaders honored at Semicon West 2023
We are so proud of our very own Mohamed Saleem, CTO of Brooks Instrument/ITW, as a distinguished recipient of the 2023 North American SEMI International Standards Honor Award presented by the SEMI International Standards. Read more
The workhorse of high-volume manufacturing across all process segments
Manufactured in our Class 100 cleanroom, GF100 mass flow controllers are widely considered the workhorse of high-volume manufacturing across all process segments. With over 1 million devices shipped, our latest innovation features the high-speed EtherCAT interface for rapid reaction times delivering exceptional application performance. Read more [Picture source: Brooks Instrument on linkedin.com]
Pressure-based Mass Flow Controllers
Since the beginning of large-scale semiconductor manufacturing, Brooks Instrument has provided innovative flow control, vapor, and pressure and vacuum solutions that have set the standard for precision, accuracy and repeatability. Our technology development team continually strives to…
Superior Long-term Stability Ensures Highly Accurate Mass Flow Control
The Brooks Instrument Mass Flow Controller (MFC) with superior long-term stability delivers key benefits to your process. Compared to a typical mass flow controller, the Brooks Instrument mass flow controller will reach target yields with accurate and stable gas…
Glass Coating Manufacturers Increase Productivity with Stable, Reliable Gas Flow Delivery and Low-pressure Control
When looking at architectural glass from the interior of a building, the low-e glass will reflect energy back into the building to achieve a much lower heat loss than ordinary glass. From the exterior viewpoint of the building, low-e glass reduces heat loss from the building by transmitting the visible part of solar energy while minimizing…
Brooks Instrument Coriolis Liquid Flow Meters & Controllers – Theory of Operation
In this video, Brooks Instrument proudly presents the theory of operation behind our third-generation Quantim® Series Coriolis liquid flow meters and controllers. The Coriolis flow meter is designed for low-flow gas and liquid applications such as catalyst research, mass balance calculations in pilot plants, and more. The basic construction of this Coriolis liquid flow meter includes a flow body, an…
Brooks Instrument Receives Supplier Excellence Award from Applied Materials
Brooks Instrument has earned a Supplier Excellence Award from Applied Materials for outstanding technical and operational achievements in areas including quality, service, lead time, cost, and responsiveness. Read more
SLAMf Series Elastomer Sealed Thermal Mass Flow Controllers & Meters
Precision mass flow control. Hardened for the harshest environments. Now available with EtherNet/IP™ and PROFINET. Read more and watch the video
Brooks Instrument Mass Flow Controllers for Hazardous Environments
Tech article highlights the SLAMf Series MFC as one of the best in the industry for measurement and control of process gases with different levels of protection required for rugged and hazardous environments. Read more