The Basics of Process Gas Analysis in Chemical Vapor Deposition

Chemical vapor deposition (CVD) processes rely on process gases for the transport of volatile precursors and byproducts. Performing process gas analysis on exhaust streams in CVD applications provides insight into the chemical reactions that occur at the surface of the substrate, enabling CVD processes to be monitored and optimized. In this article, we’re looking at the fundamentals of CVD and exploring how process gas analysis solutions from Hiden Analytical can help ensure the optimal performance of CVD processes. Read more

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