Fine-Tuning the CVD Process with COMSOL Multiphysics®

Chemical vapor deposition (CVD) is used in almost all semiconductor manufacturing processes, and most modern electronics would not exist without it. Notably, this process is used to produce uniformly thin films for microchips. Additional processes that incorporate CVD include corrosion prevention, glass coating, and the production of synthetic diamonds. In this blog post, we’ll give a brief introduction to CVD and look at a boat reactor model example to show how modeling can provide more insight into this process. Read more

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