Inline wafer scanning

Reliable wafer inspection requires more than high-resolution imaging. Scan speed, image quality and accurate positioning all play an important role in photonic wafer manufacturing. Working alongside IMS, LioniX International and Settels Savenije, Nobleo has contributed to the development and validation of an inline wafer scanning solution that combines high-magnification optical inspection with a demonstrated throughput of 10 4-inch wafers per hour. Read more

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