A New Differential Pressure Sensor Based Mass Flow Controller for Advanced Semiconductor Processing


In this video Pete Singer, Editor-in-Chief, from Semiconductor Digest interviews Mohamed Saleem, PhD, Chief Technology Officer, Brooks Instrument. Mohamed discusses how the pressure-based mass flow controllers (MFCs) operate overall. He mentions that a traditional pressure-based MFC uses two discrete pressure transducers to measure a pressure drop across a flow restrictor.

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