To ensure the extremely accurate writing of their EUV-machines, ASML introduced the Grade 1 cleanliness level in their GSA, which stands for Generic Standard of ASML. After an intensive certification process with multiple tests Innovar has now officially been released for cleaning to Grade 1 level, starting the 1st of April this year. This makes Innovar one of the very few companies the industry that is qualified for this level. Read more
