Hybrid Piezo Motor Principle for Increased Range and Dynamics, with Integrated Wafer Lift
Dynamic positioning, scanning, and alignment with precision down to the subnanometer realm is critical to success in wafer inspection and metrology.As feature sizes in semiconductor manufacturing shrink and design complexity increases, the demands on the motion systems continue to grow. Metrology processes are therefore highly dependent on precise wafer positioning solutions to enable the fast and reliable analysis of defects…
Precision Motion Innovation for the Semiconductor Industry: Wafer Stages, Air Bearings
Innovative ideas around nanopositioning and precision motion control for wafer shaping, wafer stages with piezo performance, air bearings and granite-based multi-axis motion systems. Watch the video
A-322 Air Bearing XY Planar Stage used in Research on “Parallel Direct Writing of Nanoapertures”
Learn more [Picture source: PI BeNeLux B.V. on linkedin.com]
H-850 Hexapod and 6-DOF Force Sensor used in Bone Fracture Healing Study
Read more [Picture source: PI BeNeLux B.V. on linkedin.com]
Piezo Tubes Ensure a Higher Image Resolution in Scanning Fiber Endoscopy
In medicine, finest endoscopes are not only being used for diagnostics but also more and more frequently for the therapy of illnesses. Thanks to their compact and flexible design of just a few millimeters diameter, they ensure even gentler minimally invasive procedures. Contrary to the limitations of the image quality of common endoscopes, the new innovative design of scanning fiber…
EU-Funded Project 14ACMOS: PI Contributes to Technology Node Development for Semiconductor Manufacturing
Traditionally, key manufacturing technologies for semiconductor production have come from Europe. To ensure that this does not change in the future, the European Union is funding the 14ACMOS project to develop the next technology node. It is expected that this node will enable the production of chip structures with dimensions down to 14 angstroms. Physik Instrumente…
PIRest Actuators: Active Shims with Long-Term Stability and Nanometer Resolution
Applications for active shims can be found everywhere, where the gap between two assemblies is critical and needs to be readjusted as a result of drifting or changes in tolerance. Particularly when the ambient conditions and the accessibility make manual intervention complicated, PIRest actuators are a feasible option. Read more
The Laser Interferometer Antenna (LISA) mission that will utilize PI’s hexapod for building, is officially a go
A few weeks ago, the Laser Interferometer Space Antenna (LISA) mission was officially approved, and PI’s hexapod will help to build the laser interferometer. LISA, a project of European Space Agency – ESA, is way more sensitive than previous ground-based detectors and aims to detect gravitational waves from extremely massive black holes. Read…
Why Frictionless Air Bearings Enable Precise Force Control & Position Control Applications
Motion control systems, which typically control the position of stage or actuator, are sometimes tasked to provide both position and force control. These systems work in a dual mode, where the motion controller either controls the position or the force applied. In force-control mode, the motion stage must apply a controlled force while the position can vary. In position control…
Motion Control Technique Improves Laser Micro-Hole Drilling Performance
New Piezo-Based Approach Enables Breakthrough Speed and Accuracy. Laser drilling precision and throughput are limited by a number of factors including optical distortion, tracking accuracy, acceleration limits of motion stages, and focus control performance. This new motion…