The basis of the fiber alignment system is a very stiff setup with an H-811 hexapod and an P-616 NanoCube® nanopositioner. The parallel-kinematic design for motion in degrees of freedom ensures high system stiffness. The motorreed drives make longer travel ranges possible and at the same time, the NanoCube® nanopositioner ensures fast scanning motion and dynamic compensation of drift effects. Flexure guides and all-ceramic insulated PICMA® actuators guarantee a long lifetime. Because all drives are equipped with position sensors, it is possible for example, to reliably prevent collisions with expensive silicon wafers. Read more
