December 3rd and 4th during the open house days in Veenendaal, Mitutoyo RCE demonstrated their digital holography sensor model. Access to the demo room was by invitation only. Visitors from market leaders from semiconductor, photonics and nano technology industry were shown the capabilities of the sensor model for particle detection and dimensional metrology. A field-of-view (xy) >100mm2 with a z-range > 100μm to measure submicron structures showed a lot of potential compared to existing point or line scan measurements. With in-depth technical discussions and real-time sample measurement brought by the visitors, it were 2 very fruitful days. Based on the received feedback, Mitutoyo RCE will continue with focused development activities and market driven innovation in this area.
