As the semiconductor industry moves to the sub-10 nm line nodes (such as 7nm, 5nm and smaller), nano-sized particles, once considered nuisance particles will be classified as killer defect particles. Particularly in ALD and CVD processes, the need to drive for new ultra-high purity gas filtration technology has become critical. On this scale filtration capabilities should be verified. We would like to share some specific information with you on the various semiconductor manufacturing environments in which these MOTT filters have proven themselves, resulting in less errors and less downtime. Read more
